DENSIMETRY OF AMORPHOUS-SILICON FILMS BY USING A QUARTZ OSCILLATOR

被引：6

作者：

TATSUMI, Y ^{[1
]}

OHSAKI, H ^{[1
]}

KURAHASHI, Y ^{[1
]}

IIJIMA, M ^{[1
]}

KURUMI, K ^{[1
]}

MIURA, K ^{[1
]}

INO, T ^{[1
]}

机构：

[1] OSAKA CITY UNIV,FAC SCI,DEPT PHYS,SUMIYOSHI KU,OSAKA 558,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1986年 / 25卷 / 08期

关键词：

D O I：

10.1143/JJAP.25.1152

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1152 / 1155

页数：4

共 9 条

[1] IMPROVED QUARTZ CRYSTAL MICROBALANCE TECHNIQUE [J].

BENES, E .

JOURNAL OF APPLIED PHYSICS, 1984, 56 (03) :608-626

[2] ELECTRICAL AND OPTICAL PROPERTIES OF AMORPHOUS GERMANIUM [J].

CLARK, AH .

PHYSICAL REVIEW, 1967, 154 (03) :750-&

[3] MASS-SPECTROMETRIC ANALYSIS DURING VAPOR-DEPOSITION OF AMORPHOUS SILICON [J].

MELL, H ;

BRODSKY, MH .

THIN SOLID FILMS, 1977, 46 (03) :299-305

[4] EVIDENCE OF VOIDS WITHIN AS-DEPOSITED STRUCTURE OF GLASSY SILICON [J].

MOSS, SC ;

GRACZYK, JF .

PHYSICAL REVIEW LETTERS, 1969, 23 (20) :1167-&

[5]

RICHTER H, 1958, Z NATURFORSCH PT A, V13, P988

[6] VERWENDUNG VON SCHWINGQUARZEN ZUR WAGUNG DUNNER SCHICHTEN UND ZUR MIKROWAGUNG [J].

SAUERBREY, G .

ZEITSCHRIFT FUR PHYSIK, 1959, 155 (02) :206-222

[7] VOIDS IN AMORPHOUS-SEMICONDUCTORS [J].

SHEVCHIK, NJ ;

PAUL, W .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1974, 16 (01) :55-71

[8] DENSITIES OF AMORPHOUS THIN-FILMS [J].

SHIOJIRI, M ;

SAITO, Y ;

OKADA, H ;

SASAKI, H .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1979, 18 (10) :1931-1936

[9]

Stockbridge CD, 1966, VACUUM MICROBALANCE, V5, P193

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