VOIDS IN AMORPHOUS-SEMICONDUCTORS

被引：77

作者：

SHEVCHIK, NJ ^{[1
]}

PAUL, W ^{[1
]}

机构：

[1] HARVARD UNIV,DIV ENGN & APPL PHYS,CAMBRIDGE,MA 02138

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1974年 / 16卷 / 01期

关键词：

D O I：

10.1016/0022-3093(74)90068-4

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：55 / 71

页数：17

共 22 条

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[10] EVIDENCE OF VOIDS WITHIN AS-DEPOSITED STRUCTURE OF GLASSY SILICON [J].

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