DYNAMICS OF ION-BEAM MODIFICATION OF POLYMER-FILMS

被引：19

作者：

VENKATESAN, T

BROWN, WL

MURRAY, CA

MARCANTONIO, KJ

WILKENS, BJ

机构：

来源：

POLYMER ENGINEERING AND SCIENCE | 1983年 / 23卷 / 17期

关键词：

D O I：

10.1002/pen.760231703

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：931 / 934

页数：4

共 9 条

[1]

BROWN WL, 1980, PHYS REV LETT, V45, P1632, DOI 10.1103/PhysRevLett.45.1632

[2] ION-BEAM LITHOGRAPHY [J].

BROWN, WL ;

VENKATESAN, T ;

WAGNER, A .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 191 (1-3) :157-168

[3] ION-BEAM EXPOSURE CHARACTERISTICS OF RESISTS - EXPERIMENTAL RESULTS [J].

HALL, TM ;

WAGNER, A ;

THOMPSON, LF .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (06) :3997-4010

[4]

HASHIMOTO T, 1976, 1976 IEDM TECH DIGES, P198

[5] ION-BOMBARDMENT-INDUCED IMPROVEMENT OF PHOTORESIST MASK PROPERTIES FOR RF SPUTTER-ETCHING [J].

IIDA, Y ;

OKABAYASHI, H ;

SUZUKI, K .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1977, 16 (08) :1313-1318

[6]

MACIVER BA, 1982, J ELECTROCHEM SO APR, P827

[7] THE MECHANISMS OF RADIATION-INDUCED CHANGES IN VINYL POLYMERS [J].

TODD, A .

JOURNAL OF POLYMER SCIENCE, 1960, 42 (139) :223-247

[8]

VENKATESAN T, 1983, APPL PHYS LETT, V43

[9]

VENKATESAN TS, UNPUB

← 1 →