DOPING STUDIES IN MOVPE-GROWN CDXHG1-XTE

被引:32
作者
MAXEY, CD [1 ]
GALE, IG [1 ]
CLEGG, JB [1 ]
WHIFFIN, PAC [1 ]
机构
[1] PHILIPS RES LABS,REDHILL RH1 5HA,SURREY,ENGLAND
关键词
D O I
10.1088/0268-1242/8/1S/042
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In two recent review papers on metal organic vapour phase epitaxy (MOVPE) of cadmium mercury telluride (CMT) particular emphasis was placed on the crucial importance of doping studies to the realization of future device structures. If the full potential Of MOVPE growth Of CMT is to be realized then extrinsic doping of heterostructures is required. If the doping and composition junctions can be grown with the correct degree of grading then this will create the potential for the production of device structures leading to either improved performance and/or increased operating temperatures. This paper will review published doping studies and also present some recent results on both acceptor and donor doping studies carried out by the authors. In the latter studies, interdiffused multilayer process (IMP) growth of cMT has been performed at almost-equal-to 360-degrees-C using dimethyl cadmium (Dmc) and di-isopropyl tellurium (DIPT) as the MO precursors while the Hg overpressure was provided by a heated elemental source. Alternative acceptor doping sources to arsine have been investigated including phosphine, triphenyl arsenic, and phenyl arsenic of which the latter appears to be most suitable. Iodine has continued to show the donor dopant potential in CMT that it exhibited with higher-temperature (almost-equal-to 400-degrees-C) MOVPE growth using di-ethyl tellurium (DET). Characterization of fully doped structures will be described.
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收藏
页码:S183 / S196
页数:14
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