共 20 条
- [2] LASER-DIRECT-WRITING PROCESSES - METAL-DEPOSITION, ETCHING, AND APPLICATIONS TO MICROCIRCUITS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01): : 419 - 422
- [3] Ceglio N M, 1989, J Xray Sci Technol, V1, P7, DOI 10.3233/XST-1989-1103
- [5] DEPOSITION OF THIN METAL AND METAL SILICIDE FILMS FROM THE DECOMPOSITION OF ORGANOMETALLIC COMPOUNDS [J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1989, 2 (04): : 297 - 323
- [6] EHRLICH DJ, 1981, J ELECTROCHEM SOC, V128, P2039, DOI 10.1149/1.2127793
- [7] EHRLICH DJ, 1985, SOLID STATE TECHNOL, V28, P81
- [8] FRIEND CM, 1989, CHEM PERSPECTIVES MI, P461
- [9] HEUBERGER A, 1987, MICROCIRCUIT ENG, V86