THIN-FILM AL/AL2O3/TE METAL-INSULATOR SEMICONDUCTOR CAPACITORS

被引：1

作者：

SZARO, L

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(84)90496-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1 / 5

页数：5

共 12 条

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MANY A, 1975, SEMICONDUCTOR SURFAC

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