TIME-RESOLVED REFLECTIVITY OF ARF LASER-IRRADIATED POLYIMIDE

被引：20

作者：

EDIGER, MN

PETTIT, GH

机构：

[1] Center for Devices and Radiological Health, Food and Drug Administration, HFZ-134, Rockville, MD 20857

来源：

JOURNAL OF APPLIED PHYSICS | 1992年 / 71卷 / 07期

关键词：

D O I：

10.1063/1.350905

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The time-resolved reflectivity of ArF laser-irradiated polyimide has been investigated. Substantial attenuation of the trailing portion of the reflected laser pulse is observed, and the initiation of detectable pulse clipping coincides with the ablation threshold fluence. Examination of laser light scattered into small and moderate angles shows no evidence of significant ablation-plume scattering of the reflected beam. The time course of the recovery of the ultraviolet reflectivity of the irradiation site has also been studied using pump-probe techniques. These results indicate that for ablative fluences the ultraviolet reflectivity of the site does not return to its preablation value until nearly 1 ms after the incident pulse. The dynamic reflectivity is at least partially due to optical changes in the solid polymer.

引用

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页码：3510 / 3514

页数：5

相关论文

共 11 条

[1] CALORIMETRIC AND ACOUSTIC STUDY OF ULTRAVIOLET-LASER ABLATION OF POLYMERS [J].

GORODETSKY, G ;

KAZYAKA, TG ;

MELCHER, RL ;

SRINIVASAN, R .

APPLIED PHYSICS LETTERS, 1985, 46 (09) :828-830

[2] TIME-DEPENDENT SELF-FOCUSING AND A 20-PS DELAY IN LASER ABLATION OF POLYMERS [J].

KIM, H ;

POSTLEWAITE, JC ;

ZYUNG, TH ;

DLOTT, DD .

APPLIED PHYSICS LETTERS, 1989, 54 (22) :2274-2276

[3] SHORT PULSES FROM EXCIMER LASERS [J].

KLOPOTEK, P ;

BURGHARDT, B ;

MUCKENHEIM, W .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1987, 20 (10) :1269-1270

[4] TIME-RESOLVED REFLECTIVITY AS A PROBE OF THE DYNAMICS OF LASER ABLATION OF ORGANIC POLYMERS [J].

PARASKEVOPOULOS, G ;

SINGLETON, DL ;

IRWIN, RS ;

TAYLOR, RS .

JOURNAL OF APPLIED PHYSICS, 1991, 70 (04) :1938-1946

[5] EXCIMER LASER CORNEAL ABLATION - ABSENCE OF A SIGNIFICANT INCUBATION EFFECT [J].

PETTIT, GH ;

EDIGER, MN ;

WEIBLINGER, RP .

LASERS IN SURGERY AND MEDICINE, 1991, 11 (05) :411-418

[6] TIME-RESOLVED ABLATION-SITE PHOTOGRAPHY OF XECL-LASER IRRADIATED POLYIMID [J].

SIMON, P .

APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1989, 48 (03) :253-256

[7] DYNAMICS OF EXCIMER LASER ABLATION OF POLYIMIDE DETERMINED BY TIME-RESOLVED REFLECTIVITY [J].

SINGLETON, DL ;

PARASKEVOPOULOS, G ;

TAYLOR, RS .

APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1990, 50 (03) :227-230

[8] ULTRAFAST IMAGING OF ULTRAVIOLET-LASER ABLATION AND ETCHING OF POLYMETHYLMETHACRYLATE [J].

SRINIVASAN, R ;

BRAREN, B ;

CASEY, KG ;

YEH, M .

APPLIED PHYSICS LETTERS, 1989, 55 (26) :2790-2791

[9] THE SIGNIFICANCE OF A FLUENCE THRESHOLD FOR ULTRAVIOLET-LASER ABLATION AND ETCHING OF POLYMERS [J].

SRINIVASAN, R ;

CASEY, KG ;

BRAREN, B ;

YEH, M .

JOURNAL OF APPLIED PHYSICS, 1990, 67 (03) :1604-1606

[10] ULTRAVIOLET-LASER ABLATION OF POLYIMIDE FILMS [J].

SRINIVASAN, R ;

BRAREN, B ;

DREYFUS, RW .

JOURNAL OF APPLIED PHYSICS, 1987, 61 (01) :372-376