MONTE-CARLO SIMULATIONS OF PLASMA-DEPOSITED AMORPHOUS-SILICON

被引：15

作者：

SHAW, JG

TSAI, CC

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 02期

关键词：

D O I：

10.1063/1.342509

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：699 / 701

页数：3

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