SURFACE-REACTION AND RECOMBINATION OF THE SIH3 RADICAL ON HYDROGENATED AMORPHOUS-SILICON

被引：110

作者：

PERRIN, J

BROEKHUIZEN, T

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 08期

关键词：

D O I：

10.1063/1.98165

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：433 / 435

页数：3

共 22 条

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