A SURFACE ANALYTICAL STUDY OF GAAS(100) CLEANING PROCEDURES

被引：58

作者：

LU, ZH ^{[1
]}

LAGARDE, C ^{[1
]}

SACHER, E ^{[1
]}

CURRIE, JF ^{[1
]}

YELON, A ^{[1
]}

机构：

[1] UNIV MONTREAL,ECOLE POLYTECH MONTREAL,DEPT GENIE PHYS,MONTREAL H3C 3A7,QUEBEC,CANADA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.575859

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：646 / 650

页数：5

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