THE EFFECT OF HYDROGEN PLASMA ON THE LOW-TEMPERATURE EPITAXIAL-GROWTH OF INSB

被引:13
作者
OHSHIMA, T
YAMAUCHI, S
HARIU, T
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1989年 / 28卷 / 01期
关键词
D O I
10.1143/JJAP.28.L13
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:L13 / L15
页数:3
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