STUDIES OF ION KINETIC-ENERGY DISTRIBUTIONS IN THE GASEOUS ELECTRONICS CONFERENCE RF REFERENCE CELL

被引:28
作者
OLTHOFF, JK
VANBRUNT, RJ
RADOVANOV, SB
机构
关键词
ARGON-OXYGEN PLASMAS; ION BOMBARDMENT; ION ENERGY ANALYZERS; ION KINETIC-ENERGY DISTRIBUTIONS; MASS SPECTROMETRY; RADIOFREQUENCY DISCHARGES;
D O I
10.6028/jres.100.029
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A review is presented of kinetic-energy distribution measurements for ions striking grounded surfaces in a Gaseous Electronics Conference (GEC) rf Reference Cell. Two experimental arrangements that have been used to measure ion energies in the GEC Cell are described, and a comparison of their performance under different operating conditions is presented. Significant results from ion-energy analysis in the Reference Cell are highlighted, including evidence of effects due to surface conditions on ion sampling, verification of electrical behavior of the cell, inferences about ion-molecule reactions indicated by the shapes of measured ion kinetic-energy distributions (IEDs), and the use of measured IEDs for the validation of theoretical models. The paper concludes with a detailed study of IEDs measured for rf plasmas generated in mixtures of argon and oxygen, using both experimental arrangements.
引用
收藏
页码:383 / 400
页数:18
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