IMPLANTATION PHASES IN SOLIDS

被引：8

作者：

PAVLOV, PV

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 209卷 / MAY期

关键词：

D O I：

10.1016/0167-5087(83)90883-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：791 / 798

页数：8

共 18 条

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[3]

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[4]

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[6]

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LAURENT, Y ;

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[8]

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[9] ELECTRON-MICROSCOPIC STUDIES OF SILICON LAYERS IRRADIATED WITH HIGH DOSES OF NITROGEN-IONS [J].

PAVLOV, PV ;

KRUZE, TA ;

TETELBAUM, DI ;

ZORIN, EI ;

SHITOVA, EV ;

GUDKOVA, NV .

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[10]

PAVLOV PV, 1973, DOKL AKAD NAUK SSSR+, V208, P350

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