MECHANICAL-PROPERTIES OF THIN-FILMS - MEASUREMENTS OF ULTRAMICROINDENTATION HARDNESS, YOUNG MODULUS AND INTERNAL-STRESS

被引：59

作者：

TSUKAMOTO, Y

YAMAGUCHI, H

YANAGISAWA, M

机构：

[1] NEC, Kawasaki, Jpn, NEC, Kawasaki, Jpn

来源：

THIN SOLID FILMS | 1987年 / 154卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(87)90362-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：171 / 181

页数：11

共 7 条

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[3]

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POLLOCK, HM .

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[5] ULTRA-MICROHARDNESS OF VACUUM-DEPOSITED FILMS .1. ULTRA-MICROHARDNESS TESTER [J].

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THIN SOLID FILMS, 1978, 48 (03) :325-331

[6] ULTRAMICROINDENTATION APPARATUS FOR THE MECHANICAL CHARACTERIZATION OF THIN-FILMS [J].

WIERENGA, PE ;

FRANKEN, AJJ .

JOURNAL OF APPLIED PHYSICS, 1984, 55 (12) :4244-4247

[7]

YANAGISAWA M, 1987, LUBR ENG, V43, P52

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