ABRASIVE WEAR-RESISTANCE OF ION-DEPOSITED HARD-CARBON FILMS AS A FUNCTION OF DEPOSITION ENERGY

被引：65

作者：

KOSKINEN, J

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 06期

关键词：

D O I：

10.1063/1.341115

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：2094 / 2097

页数：4

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