A HIGH-ENERGY, HIGH-CURRENT ION-IMPLANTATION SYSTEM

被引：6

作者：

ROSE, PH

FARETRA, R

RYDING, G

机构：

来源：

关键词：

D O I：

10.1016/0168-583X(85)90605-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：27 / 34

页数：8

共 11 条

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[6]

MACK M, 1983, SPRINGER SERIES ELEC, V2, P221

[7] DIAGNOSTIC-TEST FOR ION-IMPLANTATION DOSIMETRY [J].

MATTESON, S ;

TONN, DG ;

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[8]

ROSE P, UNPUB

[9] A HIGH-THROUGHPUT MECHANICALLY SCANNED TARGET CHAMBER [J].

RYDING, G ;

ARMSTRONG, A .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 189 (01) :319-325

[10]

RYDING G, 1983, SPRINGER SERIES ELEC, V2, P274