CHEMICAL VAPOR-DEPOSITION OF METALS FOR INTEGRATED-CIRCUIT APPLICATIONS

[71] DEPOSITION OF CHROMIUM FILMS BY MULTI-PHOTON DISSOCIATION OF CHROMIUM HEXACARBONYL [J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (12) : 8462 - 8469

[72] CHEMICAL VAPOR-DEPOSITION OF CHROMIUM ONTO NICKEL [J]. THIN SOLID FILMS, 1980, 65 (01) : 67 - 74

[73] MELLIARSMITH CM, 1974, J ELECTROCHEM SOC, V121, P298, DOI 10.1149/1.2401800

[74] ELECTRICAL-PROPERTIES OF SELECTIVELY DEPOSITED TUNGSTEN THIN-FILMS [J]. APPLIED PHYSICS LETTERS, 1984, 44 (12) : 1139 - 1141

[75] RELATION BETWEEN AN ATOMIC ELECTRONEGATIVITY SCALE AND WORK FUNCTION [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1978, 22 (01) : 72 - 80

[76] GROWTH OF VANADIUM ON SILICON SUBSTRATES [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1966, 113 (09) : 902 - &

[77] MILLER NE, 1982, SOLID STATE TECHNOL, V25, P85

[78] MILLER NE, 1980, SOLID STATE TECHNOL, V23, P79

[79] CHEMICAL VAPOR-DEPOSITION OF NIOBIUM ON GRAPHITE [J]. THIN SOLID FILMS, 1979, 63 (02) : 303 - 308

[80] CHEMICAL VAPOR-DEPOSITION OF MOLYBDENUM ON GRAPHITE [J]. THIN SOLID FILMS, 1980, 72 (02) : 247 - 248

[71] DEPOSITION OF CHROMIUM FILMS BY MULTI-PHOTON DISSOCIATION OF CHROMIUM HEXACARBONYL [J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (12) : 8462 - 8469

[72] CHEMICAL VAPOR-DEPOSITION OF CHROMIUM ONTO NICKEL [J]. THIN SOLID FILMS, 1980, 65 (01) : 67 - 74

[73] MELLIARSMITH CM, 1974, J ELECTROCHEM SOC, V121, P298, DOI 10.1149/1.2401800

[74] ELECTRICAL-PROPERTIES OF SELECTIVELY DEPOSITED TUNGSTEN THIN-FILMS [J]. APPLIED PHYSICS LETTERS, 1984, 44 (12) : 1139 - 1141

[75] RELATION BETWEEN AN ATOMIC ELECTRONEGATIVITY SCALE AND WORK FUNCTION [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1978, 22 (01) : 72 - 80

[76] GROWTH OF VANADIUM ON SILICON SUBSTRATES [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1966, 113 (09) : 902 - &

[77] MILLER NE, 1982, SOLID STATE TECHNOL, V25, P85

[78] MILLER NE, 1980, SOLID STATE TECHNOL, V23, P79

[79] CHEMICAL VAPOR-DEPOSITION OF NIOBIUM ON GRAPHITE [J]. THIN SOLID FILMS, 1979, 63 (02) : 303 - 308

[80] CHEMICAL VAPOR-DEPOSITION OF MOLYBDENUM ON GRAPHITE [J]. THIN SOLID FILMS, 1980, 72 (02) : 247 - 248