STEP COVERAGE IN MULTIPLE PASS SPUTTER DEPOSITION

被引：4

作者：

DENISON, DR ^{[1
]}

HARTSOUGH, LD ^{[1
]}

机构：

[1] GRYPHON PROD,HAYWARD,CA 94544

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期

关键词：

D O I：

10.1116/1.573281

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：686 / 687

页数：2

共 8 条

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[5]

SMITH JF, 1984, INT C METALLURGICAL

[6] STEP COVERAGE IN VACUUM DEPOSITION OF THIN METAL-FILMS [J].

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