ANGULAR-DISTRIBUTION OF SPUTTERED ATOMS FROM POLYCRYSTALLINE METAL TARGETS

被引：60

作者：

TSUGE, H

ESHO, S

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 07期

关键词：

D O I：

10.1063/1.329365

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4391 / 4395

页数：5

共 19 条

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