ELECTRICAL-RESISTIVITY OF POLYCRYSTALLINE NIOBIUM NITRIDE FILMS

被引:56
作者
NIGRO, A
NOBILE, G
RUBINO, MG
VAGLIO, R
机构
来源
PHYSICAL REVIEW B | 1988年 / 37卷 / 08期
关键词
D O I
10.1103/PhysRevB.37.3970
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:3970 / 3972
页数:3
相关论文
共 9 条
[1]   MICROSCOPIC INVESTIGATION OF NBN SPUTTERED FILMS [J].
GRAY, KE ;
KAMPWIRTH, RT ;
CAPONE, DM ;
VAGLIO, R .
PHYSICA B & C, 1985, 135 (1-3) :164-167
[2]   ELECTRON-MICROSCOPY STUDY OF SPUTTERED NBN FILMS [J].
HO, HL ;
KAMPWIRTH, RT ;
GRAY, KE ;
CAPONE, DW ;
CHUMBLEY, LS ;
MESHII, M .
ULTRAMICROSCOPY, 1987, 22 (1-4) :297-303
[3]   GROWTH AND PROPERTIES OF SINGLE-CRYSTAL TIN FILMS DEPOSITED BY REACTIVE MAGNETRON SPUTTERING [J].
JOHANSSON, BO ;
SUNDGREN, JE ;
GREENE, JE ;
ROCKETT, A ;
BARNETT, SA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (02) :303-307
[4]   ELECTRICAL-CONDUCTION IN CONCENTRATED DISORDERED TRANSITION-METAL ALLOYS [J].
MOOIJ, JH .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1973, 17 (02) :521-530
[5]  
NIGRO A, UNPUB
[6]   GRAIN-BOUNDARY RESISTANCE IN POLYCRYSTALLINE METALS [J].
REISS, G ;
VANCEA, J ;
HOFFMANN, H .
PHYSICAL REVIEW LETTERS, 1986, 56 (19) :2100-2103
[8]   MEAN FREE-PATH AND EFFECTIVE DENSITY OF CONDUCTION ELECTRONS IN POLYCRYSTALLINE METAL-FILMS [J].
VANCEA, J ;
HOFFMANN, H ;
KASTNER, K .
THIN SOLID FILMS, 1984, 121 (03) :201-216
[9]   ELECTRON-MICROSCOPIC EVIDENCE FOR A COLUMNAR-VOID-TYPE STRUCTURE IN SPUTTERED NBN FILMS [J].
WAGNER, W ;
AST, D ;
GAVALER, JR .
JOURNAL OF APPLIED PHYSICS, 1974, 45 (01) :465-466