DOUBLE CRYSTAL X-RAY-ANALYSIS OF PHOSPHORUS PRECIPITATION IN SUPERSATURATED SI-P SOLID-SOLUTIONS

被引:8
作者
SERVIDORI, M [1 ]
MONTE, CD [1 ]
ZINI, Q [1 ]
机构
[1] UNIV BOLOGNA,IST FIS,I-40126 BOLOGNA,ITALY
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1983年 / 80卷 / 01期
关键词
D O I
10.1002/pssa.2210800131
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:277 / 285
页数:9
相关论文
共 23 条
[1]  
ARMIGLIATO A, 1977, J APPL PHYS, V47, P5489
[2]  
BENTINI GG, COMMUNICATION
[3]  
Burenkov Yu. A., 1974, Soviet Physics - Solid State, V16, P963
[4]   LATTICE-PARAMETER STUDY OF SILICON UNIFORMLY DOPED WITH BORON AND PHOSPHORUS [J].
CELOTTI, G ;
NOBILI, D ;
OSTOJA, P .
JOURNAL OF MATERIALS SCIENCE, 1974, 9 (05) :821-828
[5]  
FAIR RB, 1977, J ELECT SOC, V124, P1102
[6]  
FAIR RB, 1979, J APPL PHYS, V50, P862
[7]   ELECTRICAL-PROPERTIES AND STABILITY OF SUPERSATURATED PHOSPHORUS-DOPED SILICON LAYERS [J].
FINETTI, M ;
NEGRINI, P ;
SOLMI, S ;
NOBILI, D .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (06) :1313-1317
[8]  
FOGARASSY E, 1980, J ELECT MATER, V9, P1977
[9]   DETERMINATION OF STRAIN DISTRIBUTIONS FROM X-RAY BRAGG REFLECTION BY SILICON SINGLE-CRYSTALS [J].
FUKUHARA, A ;
TAKANO, Y .
ACTA CRYSTALLOGRAPHICA SECTION A, 1977, 33 (JAN1) :137-142
[10]   APPLICATION OF A PRECISE DOUBLE X-RAY SPECTROMETER FOR ACCURATE LATTICE-PARAMETER DETERMINATION [J].
GODWOD, K ;
KOWALCZYK, R ;
SZMID, Z .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1974, 21 (01) :227-234