MACROSCOPIC ELECTRONIC BEHAVIOR AND ATOMIC ARRANGEMENTS OF GAAS-SURFACES IMMERSED IN HCL SOLUTION

被引:14
作者
ISHIKAWA, Y [1 ]
ISHII, H [1 ]
HASEGAWA, H [1 ]
FUKUI, T [1 ]
机构
[1] HOKKAIDO UNIV,DEPT ELECT ENGN,SAPPORO,HOKKAIDO 060,JAPAN
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 04期
关键词
D O I
10.1116/1.587237
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The macroscopic electronic behavior and atomic arrangements of the GaAs surfaces immersed in HCI solution were studied by surface current transport (SCT), band-edge photoluminescence (PL), atomic force microscopy (AFM), and x-ray photoelectron spectroscopy (XPS). SCT measurements indicated reduction of the surface band bending on immersion into HCI solution for both n- and p-type materials. A remarkable increase of the band-edge PL intensity was also observed. In the AFM image taken in HCI solution, the (001) surface showed an array of atoms along [110] and [110BAR] direction with the spacing of 4.1 angstrom, indicating presence of a (1 X 1) structure. Similarly, (1 X 1) images with threefold symmetry were observed on the (111)A and (111)B surfaces. The XPS analysis of the GaAs surfaces after immersion into HCI solution detected a monolayer level presence of gallium chloride. These results indicate that bond termination on the GaAs surface by adsorption of Cl atoms. to surface Ga atoms realizes a nonstrained regular (1 X 1) passivation structure which removes surface states from the band-gap region.
引用
收藏
页码:2713 / 2719
页数:7
相关论文
共 15 条
[1]   ANGLE-RESOLVED SUPERSONIC MOLECULAR-BEAM STUDY OF THE CL2/GAAS(110) THERMAL ETCHING REACTION [J].
DELOUISE, LA .
JOURNAL OF CHEMICAL PHYSICS, 1991, 94 (02) :1528-1542
[2]   HALOGENATION OF GAAS (100) AND (111) SURFACES USING ATOMIC-BEAMS [J].
FREEDMAN, A ;
STINESPRING, CD .
JOURNAL OF PHYSICAL CHEMISTRY, 1992, 96 (05) :2253-2258
[3]   INVESTIGATIONS OF THE THERMAL-REACTIONS OF CHLORINE ON THE GAAS(100) SURFACE [J].
FRENCH, CL ;
BALCH, WS ;
FOORD, JS .
JOURNAL OF PHYSICS-CONDENSED MATTER, 1991, 3 :S351-S355
[4]   UNIFIED DISORDER INDUCED GAP STATE MODEL FOR INSULATOR-SEMICONDUCTOR AND METAL-SEMICONDUCTOR INTERFACES [J].
HASEGAWA, H ;
OHNO, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (04) :1130-1138
[5]   CONTROL OF FERMI LEVEL PINNING AND RECOMBINATION PROCESSES AT GAAS-SURFACES BY CHEMICAL AND PHOTOCHEMICAL TREATMENTS [J].
HASEGAWA, H ;
ISHII, H ;
SAWADA, T ;
SAITOH, T ;
KONISHI, S ;
LIU, YA ;
OHNO, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (04) :1184-1192
[6]  
HUHEEY JE, 1983, INORG CHEM, P968
[7]  
ITABASHI N, UNPUB
[8]   ATOMIC LAYER ETCHING CHEMISTRY OF CL2 ON GAAS(100) [J].
LUDVIKSSON, A ;
XU, MD ;
MARTIN, RM .
SURFACE SCIENCE, 1992, 277 (03) :282-300
[9]   DIGITAL ETCHING OF GAAS - NEW APPROACH OF DRY ETCHING TO ATOMIC ORDERED PROCESSING [J].
MEGURO, T ;
HAMAGAKI, M ;
MODARESSI, S ;
HARA, T ;
AOYAGI, Y ;
ISHII, M ;
YAMAMOTO, Y .
APPLIED PHYSICS LETTERS, 1990, 56 (16) :1552-1554
[10]   REACTIONS OF CL WITH GAAS - A THEORETICAL UNDERSTANDING OF GAAS-SURFACE ETCHING [J].
OHNO, T .
PHYSICAL REVIEW B, 1991, 44 (15) :8387-8390