INFLUENCE OF IMPLANTED XENON ON SPUTTERING YIELD OF SILICON

[1] COLLECTION AND SPUTTERING EXPERIMENTS WITH NOBLE GAS IONS [J]. NUCLEAR INSTRUMENTS & METHODS, 1961, 11 (02): : 257 - 278

[2] DOSE DEPENDENCE OF 45 keV V + AND Bi + ION SPUTTERING YIELD OF COPPER. [J]. Radiation Effects, 1973, 19 (04): : 257 - 261

[3] Andersen H. H., 1973, Radiation Effects, V19, P139, DOI 10.1080/00337577308232233

[4] NONLINEAR EFFECTS IN HEAVY-ION SPUTTERING [J]. JOURNAL OF APPLIED PHYSICS, 1974, 45 (02) : 953 - 954

[5] ANDERSEN HH, 1972, RADIAT EFF, V13, P67

[6] ARMINEN E, 1971, ANN ACAD SCI FENN A6

[7] TESTS OF BRAGG RULE FOR ENERGY-LOSS OF HE-4 IONS IN SOLID COMPOUNDS [J]. JOURNAL OF APPLIED PHYSICS, 1974, 45 (03) : 1413 - 1415

[8] ON SPUTTERING MECHANISM IN ENERGY RANGE OF RUTHERFORD BACKSCATTERING [J]. PHYSICS LETTERS A, 1969, A 30 (09) : 506 - +

[9] BLANK P, TO BE PUBLISHED

[10] BRAGG WH, 1905, PHILOS MAG, V10, P5318

[1] COLLECTION AND SPUTTERING EXPERIMENTS WITH NOBLE GAS IONS [J]. NUCLEAR INSTRUMENTS & METHODS, 1961, 11 (02): : 257 - 278

[2] DOSE DEPENDENCE OF 45 keV V + AND Bi + ION SPUTTERING YIELD OF COPPER. [J]. Radiation Effects, 1973, 19 (04): : 257 - 261

[3] Andersen H. H., 1973, Radiation Effects, V19, P139, DOI 10.1080/00337577308232233

[4] NONLINEAR EFFECTS IN HEAVY-ION SPUTTERING [J]. JOURNAL OF APPLIED PHYSICS, 1974, 45 (02) : 953 - 954

[5] ANDERSEN HH, 1972, RADIAT EFF, V13, P67

[6] ARMINEN E, 1971, ANN ACAD SCI FENN A6

[7] TESTS OF BRAGG RULE FOR ENERGY-LOSS OF HE-4 IONS IN SOLID COMPOUNDS [J]. JOURNAL OF APPLIED PHYSICS, 1974, 45 (03) : 1413 - 1415

[8] ON SPUTTERING MECHANISM IN ENERGY RANGE OF RUTHERFORD BACKSCATTERING [J]. PHYSICS LETTERS A, 1969, A 30 (09) : 506 - +

[9] BLANK P, TO BE PUBLISHED

[10] BRAGG WH, 1905, PHILOS MAG, V10, P5318