X-RAY-LITHOGRAPHY SYSTEM - ANALYSIS AND AN OPTIMUM CONSTRUCTION

被引：2

作者：

YAMAKOSHI, Y ^{[1
]}

ATODA, N ^{[1
]}

SHIMIZU, K ^{[1
]}

SATO, T ^{[1
]}

SHIMIZU, Y ^{[1
]}

机构：

[1] ELECTROTECH LAB,SAKURA,IBARAKI 305,JAPAN

来源：

APPLIED OPTICS | 1986年 / 25卷 / 06期

关键词：

D O I：

10.1364/AO.25.000922

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：922 / 927

页数：6

共 8 条

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