HIGH-RESOLUTION ELECTRON-MICROSCOPY OF SEMICONDUCTORS AND METALS

被引:4
作者
BULLELIEUWMA, CWT
COENE, W
DEJONG, AF
机构
[1] Philips Research Laboratories, Eindhoven, NL-5600 JA
关键词
D O I
10.1002/adma.19910030708
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Review: Two-dimensional information on the microstructure of materials at a resolution comparable to interatomic distances is crucial for the study of interfaces, defects, growth mechanisms etc. One of the most important analytical methods for gaining such information is high-resolution electron microscopy (HREM). The interpretation of the results on semiconductors, magnetic alloys and multilayers, can often be facilitated through image processing and simulation.
引用
收藏
页码:368 / 378
页数:11
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