AN IMPROVED ALTERED LAYER MODEL FOR ION ASSISTED DEPOSITION UNDER NET SPUTTERING EROSION CONDITIONS

被引：5

作者：

CARTER, G

KATARDJIEV, IV

NOBES, MJ

机构：

来源：

VACUUM | 1989年 / 39卷 / 01期

关键词：

D O I：

10.1016/0042-207X(89)90096-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：37 / 43

页数：7

共 22 条

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