ALGAAS/GAAS HBTS WITH REDUCED BASE-COLLECTOR CAPACITANCE BY USING BURIED SIO2 AND POLYCRYSTALLINE GAAS IN THE EXTRINSIC BASE AND COLLECTOR

被引:3
作者
MOCHIZUKI, K [1 ]
NAKAMURA, T [1 ]
TANOUE, T [1 ]
MASUDA, H [1 ]
HORIUCHI, M [1 ]
机构
[1] HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO 185,JAPAN
关键词
D O I
10.1109/16.239802
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
[No abstract available]
引用
收藏
页码:2124 / 2125
页数:2
相关论文
共 7 条
[1]   GAALAS/GAAS HETEROJUNCTION BIPOLAR-TRANSISTORS - ISSUES AND PROSPECTS FOR APPLICATION [J].
ASBECK, PM ;
CHANG, MCF ;
HIGGINS, JA ;
SHENG, NH ;
SULLIVAN, GJ ;
WANG, KC .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1989, 36 (10) :2032-2042
[2]   SUBPICOSECOND INP/INGAAS HETEROSTRUCTURE BIPOLAR-TRANSISTORS [J].
CHEN, YK ;
NOTTENBURG, RN ;
PANISH, MB ;
HAMM, RA ;
HUMPHREY, DA .
IEEE ELECTRON DEVICE LETTERS, 1989, 10 (06) :267-269
[3]   GAAS PLANAR TECHNOLOGY BY MOLECULAR-BEAM EPITAXY (MBE) [J].
CHO, AY ;
BALLAMY, WC .
JOURNAL OF APPLIED PHYSICS, 1975, 46 (02) :783-785
[4]  
ISHIBASHI T, 1990, 48 ANN DEV RES C
[5]   SELF-ALIGNED A1INAS-GAINAS HETEROJUNCTION BIPOLAR-TRANSISTORS AND CIRCUITS [J].
MISHRA, UK ;
JENSEN, JF ;
RENSCH, DB ;
BROWN, AS ;
STANCHINA, WE ;
TREW, RJ ;
PIERCE, MW ;
KARGODORIAN, TV .
IEEE ELECTRON DEVICE LETTERS, 1989, 10 (10) :467-469
[6]  
MOCHIZUKI K, UNPUB 1993 EL MAT C
[7]   SELF-ALIGNED TRANSISTOR WITH SIDEWALL BASE ELECTRODE [J].
NAKAMURA, T ;
MIYAZAKI, T ;
TAKAHASHI, S ;
KURE, T ;
OKABE, T ;
NAGATA, M .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1982, 29 (04) :596-600