TARGET HEATING DURING ION-IMPLANTATION

被引：83

作者：

PARRY, PD ^{[1
]}

机构：

[1] WESTERN ELECT ENGN RES CTR,PRINCETON,NJ 08540

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1976年 / 13卷 / 02期

关键词：

D O I：

10.1116/1.569046

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：622 / 629

页数：8

共 13 条

[1] LASER DAMAGE IN TRIGLYCINE SULFATE - EXPERIMENTAL RESULTS AND THERMAL-ANALYSIS
BARTOLI, F
KRUER, M
ESTEROWITZ, L
ALLEN, R
[J]. JOURNAL OF APPLIED PHYSICS, 1973, 44 (08) : 3713 - 3720
[2] Dearnley G, 1973, ION IMPLANTATION, P421
[3] FREEMAN JH, 1974, 4TH INT C ION IMPL S
[4] HODGMAN CD, 1955, HDB CHEMISTRY PHYSIC, P2700
[5] TEMPERATURE DISTRIBUTION IN A SEMI-INFINITE SOLID UNDER A FAST-MOVING ARBITRARY HEAT SOURCE
LING, FF
YANG, CC
[J]. INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER, 1971, 14 (02) : 199 - &
[6] MICROMACHINING AND IMAGE RECORDING ON THIN FILMS BY LASER BEAMS
MAYDAN, D
[J]. BELL SYSTEM TECHNICAL JOURNAL, 1971, 50 (06): : 1761 - +
[7] 2-DIMENSIONAL RADIATIVE EQUILIBRIUM OF A GRAY MEDIUM IN A PLANE LAYER BOUNDED BY GRAY NONISOTHERMAL WALLS
MODEST, MF
[J]. JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME, 1974, 96 (04): : 483 - 488
[8] LOW-VOLTAGE TRIODE SPUTTERING AND BACKSPUTTERING WITH A CONFINED PLASMA .4. HEAT-TRANSFER CHARACTERISTICS
NEVIS, BE
TISONE, TC
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (06): : 1177 - 1185
[9] THERMAL-ANALYSIS OF THIN-FILM MICROMACHINING WITH LASERS
PAEK, UC
KESTENBAUM, A
[J]. JOURNAL OF APPLIED PHYSICS, 1973, 44 (05) : 2260 - 2268
[10] Parry P. D., 1973, 1973 International Electron Devices Meeting Supplement (Abstracts only)