CORRELATION BETWEEN PHYSICAL-PROPERTIES AND HYDROGEN CONCENTRATION IN MAGNETRON-SPUTTERED AMORPHOUS-SILICON

被引：8

作者：

DEMICHELIS, F

MINETTIMEZZETTI, E

TAGLIAFERRO, A

TRESSO, E

RAVA, P

DELLAMEA, GA

MAZZOLDI, P

机构：

[1] ELETTRORAVA SOC AZIONI,I-10040 SAVONERA,ITALY

[2] UNIV PADUA,DEPARTIMENTO FIS,I-35100 PADUA,ITALY

来源：

PHYSICAL REVIEW B | 1986年 / 33卷 / 10期

关键词：

D O I：

10.1103/PhysRevB.33.7022

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：7022 / 7028

页数：7

共 21 条

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