TIME OF FLIGHT ANALYSIS OF IONIZED AND NEUTRAL SPECIES SPUTTERED FROM NICKEL TARGETS USING MULTIPHOTON RESONANCE IONIZATION

被引：8

作者：

HASHIMOTO, Y

OGOSHI, H

MORITA, K

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 33卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(88)90619-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：515 / 518

页数：4

共 12 条

[1]

BAY HL, 1987, NUCL INSTRUM METH B, V18, P430

[2]

De Vries A. E., 1980, P S SPUTTERING, P256

[3]

HUSINSKY W, 1987, NUCL INSTRUM METH B, V18, P452

[4]

KIMOCK FM, 1983, NUCL INSTRUM METHODS, V218, P569

[5] TRANSIENT CHANGE IN THE VELOCITY DISTRIBUTION-FUNCTIONS OF SPUTTERED ATOMS DURING INITIAL DOSE IN ION-BEAM BOMBARDMENT [J].

MATSUDA, Y ;

HONDA, C ;

MATSUBAGUCHI, S ;

MOROISHI, T ;

MURAOKA, K ;

MAEDA, M ;

AKAZAKI, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (03) :L182-L184

[6] STUDIES OF TEMPERATURE AND FLUX DEPENDENCES OF SPUTTERING YIELD OF NICKEL FROM 2-LAYERED FILMS OF NI-NI3C [J].

MORITA, K ;

OHNO, H ;

HAYASHIBARA, M ;

ITOH, N .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 2 (1-3) :596-600

[7]

OECHSNER H, 1978, SURF SCI, V55, P289

[8]

PELLIN MJ, 1984, SURF SCI, V144, P619, DOI 10.1016/0039-6028(84)90123-7

[9]

THOMPSON MW, 1987, NUCL INSTR METH B, V18, P401

[10] MECHANISMS OF ATOMIC ION EMISSION DURING SPUTTERING [J].

YU, ML ;

LANG, ND .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 14 (4-6) :403-413

← 1 2 →