SUBSURFACE COMPOSITIONAL MODIFICATIONS IN NI-CU ALLOYS DURING HIGH-TEMPERATURE ION SPUTTERING

被引：67

作者：

LAM, NQ

HOFF, HA

WIEDERSICH, H

REHN, LE

机构：

来源：

SURFACE SCIENCE | 1985年 / 149卷 / 2-3期

关键词：

D O I：

10.1016/0039-6028(85)90079-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：517 / 536

页数：20

共 40 条

[1]

Andersen H. H., 1981, Sputtering by particle bombardment I. Physical sputtering of single-element solids, P145

[2] SURFACE SEGREGATION DURING ALLOY SPUTTERING AND IMPLANTATION [J].

ANDERSEN, HH ;

STENUM, B ;

SORENSEN, T ;

WHITLOW, HJ .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY) :487-494

[3]

ANDERSEN HH, 1980, PHYSICS IONIZED GASE, P421

[4] ALLOY SPUTTERING [J].

BETZ, G .

SURFACE SCIENCE, 1980, 92 (01) :283-309

[5]

BUTRYMOWICZ DB, 1977, DIFFUSION RATE DATA, P196

[6] SPUTTERING MODELS - A SYNOPTIC VIEW [J].

HARRISON, DE .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1983, 70 (1-4) :1-64

[7]

HELFMEIER HU, 1974, Z METALLKD, V65, P238

[8] EFFECTS OF ENHANCED DIFFUSION ON PREFERRED SPUTTERING OF HOMOGENEOUS ALLOY SURFACES [J].

HO, PS .

SURFACE SCIENCE, 1978, 72 (02) :253-263

[9] AUGER STUDY OF PREFERRED SPUTTERING ON BINARY ALLOY SURFACES [J].

HO, PS ;

LEWIS, JE ;

WILDMAN, HS ;

HOWARD, JK .

SURFACE SCIENCE, 1976, 57 (01) :393-405

[10]

Inui T., 1979, Technology Reports of the Osaka University, V29, P373

← 1 2 3 4 →