EXPERIMENTS ON X-RAY-LITHOGRAPHY USING SYNCHROTRON RADIATION FROM THE VEPP-2M STORAGE RING

被引：6

作者：

GLUSKIN, ES

KRASNOPEROVA, AA

KULIPANOV, GN

NAZMOV, VP

PINDJURIN, VF

SKRINSKY, AN

CHESNOKOV, VV

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 208卷 / 1-3期

关键词：

D O I：

10.1016/0167-5087(83)91156-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

At the Institute of Nuclear Physics (Novosibirsk) the storage ring VEPP-2M has been used in X-ray lithography experiments for several years. In this paper, the main results of these experiments are reported and the requirements of a radiation source which is suitable for producing integrated circuits with elements of submicron size are briefly analyzed.

引用

页码：393 / 398

页数：6

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