AUGER-ELECTRON AND X-RAY PHOTOELECTRON-SPECTROSCOPY ANALYSIS OF THE HYDROGENATED AMORPHOUS SILICON-TIN OXIDE INTERFACE - EVIDENCE OF A PLASMA-INDUCED REACTION

被引：31

作者：

THOMAS, JH

CATALANO, A

机构：

来源：

APPLIED PHYSICS LETTERS | 1983年 / 43卷 / 01期

关键词：

D O I：

10.1063/1.94143

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：101 / 102

页数：2

共 14 条

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