AN ULTRAHIGH VACUUM-COMPATIBLE SCANNING TUNNELING MICROSCOPE HEAD MOUNTED ON A 2 3/4 IN OUTER DIAMETER FLANGE

被引:9
作者
SCHMID, AK
KIRSCHNER, J
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1991年 / 9卷 / 02期
关键词
D O I
10.1116/1.585478
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A simplified ultra-high-vacuum scanning-tunneling-microscope (UHV-STM) was developed. The UHV-STM can be mounted through a 35-mm i.d. flange in arbitrary spatial orientation. It is thermally well-compensated and highly insensitive to vibrations. The scanner provides atomic resolution capability as well as a large scan range of 7 X 7-mu-m. The UHV-STM is driven by unmodified "Nanoscope 2" electronics. Samples as well as tips are exchangeable via an airlock system. Topographic images of the 7 X 7 reconstruction on Si(111) and of micron-size Au islands on Si(111) are shown.
引用
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页码:648 / 650
页数:3
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