KINETICS AND MECHANISM OF REACTION AT ROOM-TEMPERATURE IN THIN AU/METAL COUPLES

被引:20
作者
MARINKOVIC, Z
SIMIC, V
机构
[1] Inst of Physics, Belgrade, Yugosl, Inst of Physics, Belgrade, Yugosl
关键词
ALUMINUM AND ALLOYS - Diffusion - GOLD AND ALLOYS - Thin Films - TIN AND ALLOYS - X-RAYS - Diffraction - ZINC AND ALLOYS;
D O I
10.1016/0040-6090(88)90286-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The reaction kinetics of compound formation at room temperature in thin film Au/Me (Me equals Al, Cd, Ga, In, Pb, Sb, Sn, Zn) couples have been investigated by X-ray diffraction. The decrease in the (111) diffraction peak of gold or of the metal, or the increase in the diffraction peak of the corresponding compound, has been followed as a function of time. These reactions were found to be diffusion controlled. The interdiffusion coefficients have been calculated for the investigated couples and a relation has been found to exist between the diffusion coefficient D (cm**2s** minus **1) and the melting temperature T//t(K) of the metal.
引用
收藏
页码:105 / 115
页数:11
相关论文
共 15 条
[1]   SPECIAL ASPECTS OF DIFFUSION IN THIN-FILMS [J].
BALLUFFI, RW ;
BLAKELY, JM .
THIN SOLID FILMS, 1975, 25 (02) :363-392
[2]   An X-ray method of determining rates of diffusion in the solid state [J].
DuMond, J ;
Youtz, JP .
JOURNAL OF APPLIED PHYSICS, 1940, 11 (05) :357-365
[3]   INTERDIFFUSION AND PHASE FORMATION IN AU/SN THIN-FILM COUPLES WITH SPECIAL EMPHASIS ON SUBSTRATE-TEMPERATURE DURING CONDENSATION [J].
HUGSTED, B ;
BUENE, L ;
FINSTAD, T ;
LONSJO, O ;
OLSEN, T .
THIN SOLID FILMS, 1982, 98 (02) :81-94
[4]  
KOLESNIK.DP, 1972, FIZ MET METALLOVED+, V34, P529
[5]   INTERNAL STRESSES AND INTERDIFFUSION OF TI-PD-AU FILMS STUDIED BY X-RAY-DIFFRACTION TECHNIQUES [J].
LAU, SS ;
SUN, RC .
THIN SOLID FILMS, 1972, 10 (02) :273-+
[6]   CONDITIONS FOR COMPOUND FORMATION IN AU METAL COUPLES AT ROOM-TEMPERATURE [J].
MARINKOVIC, Z ;
SIMIC, V .
JOURNAL OF THE LESS-COMMON METALS, 1986, 115 (02) :225-234
[7]   ROOM-TEMPERATURE INTERACTIONS IN AU-METAL AND AL-METAL THIN-FILM COUPLES [J].
MARINKOVIC, Z ;
SIMIC, V .
THIN SOLID FILMS, 1981, 75 (03) :229-235
[8]  
MARINKOVIC Z, 1977, 7TH P INT VAC C 3RD, P2111
[9]   INTERACTIONS IN METALLIZATION SYSTEMS FOR INTEGRATED-CIRCUITS [J].
MURARKA, SP .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1984, 2 (04) :693-706
[10]   THIN-FILM INTERDIFFUSION OF AU AND IN AT ROOM-TEMPERATURE [J].
SIMIC, V ;
MARINKOVIC, Z .
THIN SOLID FILMS, 1977, 41 (01) :57-61