INTERACTIONS IN METALLIZATION SYSTEMS FOR INTEGRATED-CIRCUITS

[1] Adams A. C., 1983, VLSI technology, P93

[2] DEPENDENCE OF ELECTROMIGRATION-INDUCED FAILURE TIME ON LENGTH AND WIDTH OF ALUMINUM THIN-FILM CONDUCTORS [J]. JOURNAL OF APPLIED PHYSICS, 1970, 41 (10) : 3954 - &

[3] Aronsson B., 1965, BORIDES SILICIDES PH

[4] TITANIUM-TUNGSTEN CONTACTS TO SI - THE EFFECTS OF ALLOYING ON SCHOTTKY CONTACT AND ON SILICIDE FORMATION [J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (10) : 6898 - 6905

[5] FORMATION OF SILICIDES IN MO-W BILAYER FILMS ON SI SUBSTRATES - MARKER EXPERIMENT [J]. JOURNAL OF ELECTRONIC MATERIALS, 1979, 8 (05) : 641 - 661

[6] BAGLIN JEE, 1978, P S THIN FILMS INTER

[7] THERMAL ANNEALING STUDY OF AU-TI-W METALLIZATION ON SILICON [J]. THIN SOLID FILMS, 1980, 69 (01) : 53 - 62

[8] SILICON METAL SILICIDE HETEROSTRUCTURES GROWN BY MOLECULAR-BEAM EPITAXY [J]. APPLIED PHYSICS LETTERS, 1980, 37 (07) : 643 - 646

[9] ACCEPTOR DOPANTS IN SILICON MOLECULAR-BEAM EPITAXY [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) : 3395 - 3399

[10] BLACK J, 1977, RADCTR77410 MOT SEM

[1] Adams A. C., 1983, VLSI technology, P93

[2] DEPENDENCE OF ELECTROMIGRATION-INDUCED FAILURE TIME ON LENGTH AND WIDTH OF ALUMINUM THIN-FILM CONDUCTORS [J]. JOURNAL OF APPLIED PHYSICS, 1970, 41 (10) : 3954 - &

[3] Aronsson B., 1965, BORIDES SILICIDES PH

[4] TITANIUM-TUNGSTEN CONTACTS TO SI - THE EFFECTS OF ALLOYING ON SCHOTTKY CONTACT AND ON SILICIDE FORMATION [J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (10) : 6898 - 6905

[5] FORMATION OF SILICIDES IN MO-W BILAYER FILMS ON SI SUBSTRATES - MARKER EXPERIMENT [J]. JOURNAL OF ELECTRONIC MATERIALS, 1979, 8 (05) : 641 - 661

[6] BAGLIN JEE, 1978, P S THIN FILMS INTER

[7] THERMAL ANNEALING STUDY OF AU-TI-W METALLIZATION ON SILICON [J]. THIN SOLID FILMS, 1980, 69 (01) : 53 - 62

[8] SILICON METAL SILICIDE HETEROSTRUCTURES GROWN BY MOLECULAR-BEAM EPITAXY [J]. APPLIED PHYSICS LETTERS, 1980, 37 (07) : 643 - 646

[9] ACCEPTOR DOPANTS IN SILICON MOLECULAR-BEAM EPITAXY [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) : 3395 - 3399

[10] BLACK J, 1977, RADCTR77410 MOT SEM