SELECTIVE ETCHING TECHNOLOGY FOR 94GHZ GAAS IMPATT DIODES ON DIAMOND HEAT SINKS

被引:30
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EISELE, H
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10.1016/0038-1101(89)90100-7
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码:253 / 257
页数:5
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