GROWTH AND PROPERTIES OF CD3AS2 FILMS PREPARED BY PULSED-LASER EVAPORATION

被引:9
作者
DUBOWSKI, JJ
WILLIAMS, DF
机构
[1] Natl Research Council of Canada,, Semiconductor Research Group,, Ottawa, Ont, Can, Natl Research Council of Canada, Semiconductor Research Group, Ottawa, Ont, Can
关键词
Electric properties - EVAPORATION - Laser Applications - LASERS - Applications - SEMICONDUCTING FILMS - Growth;
D O I
10.1139/p85-131
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Pulsed-laser evaporation has been used to prepare films of Cd//3As//2. It is found that the electrical quality of the prepared films improves markedly as the substrate temperature is increased from 295 to 433 K. The films deposited at about 430 K are highly oriented, with electrical characteristics approaching those of the bulk material. Electron mobilities reach values of 6. 05 multiplied by 10**3 cm**2/V multiplied by (times) s at 300 K (i. e. , comparable to bulk mobilities) and 9 multiplied by 10**3 cm**2/V multiplied by (times) s at 10 K (which is within a factor of two of those for the bulk material). Further increases in the substrate-deposition temperature give rise to films that are arsenic deficient.
引用
收藏
页码:815 / 818
页数:4
相关论文
共 10 条
[1]  
AKHASKHALYAN AD, 1982, SOV PHYS-TECH PHYS, V27, P969
[2]   RECENT PROGRESS ON LADA GROWTH OF HGCDTE AND CDTE EPITAXIAL LAYERS [J].
CHEUNG, JT ;
MAGEE, T .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1983, 1 (03) :1604-1607
[3]   PULSED LASER EVAPORATION OF CD3AS2 [J].
DUBOWSKI, JJ ;
WILLIAMS, DF .
APPLIED PHYSICS LETTERS, 1984, 44 (03) :339-341
[4]   GROWTH OF POLYCRYSTALLINE CD3AS2 FILMS ON ROOM-TEMPERATURE SUBSTRATES BY A PULSED-LASER EVAPORATION TECHNIQUE [J].
DUBOWSKI, JJ ;
WILLIAMS, DF .
THIN SOLID FILMS, 1984, 117 (04) :289-297
[5]   SPHERICAL AND PLANE MULTILAYER NORMAL INCIDENCE MIRRORS FOR SOFT X-RAYS [J].
GAPONOV, SV ;
GLUSKIN, ES ;
GUSEV, SA ;
PLANONOV, YY ;
SALASHCHENKO, NN .
OPTICS COMMUNICATIONS, 1983, 48 (04) :229-232
[6]   LASER-INDUCED DEPOSITION OF SILICON FILMS [J].
HANABUSA, M ;
MORIYAMA, S ;
KIKUCHI, H .
THIN SOLID FILMS, 1983, 107 (03) :227-234
[7]   NUCLEATION PROCESSES OF CD3AS2 FILMS ON SODIUM-CHLORIDE SUBSTRATES [J].
MIOTKOWSKA, S ;
ZDANOWICZ, L .
JOURNAL OF CRYSTAL GROWTH, 1980, 48 (03) :387-393
[8]  
NARAYAN J, 1983, LASER SOLID INTERACT
[9]   LASER MICROCHEMISTRY AND ITS APPLICATION TO ELECTRON-DEVICE FABRICATION [J].
OSGOOD, RM .
ANNUAL REVIEW OF PHYSICAL CHEMISTRY, 1983, 34 :77-101
[10]   LASER PROCESSING OF SEMICONDUCTOR-MATERIALS [J].
YOUNG, RT ;
WOOD, RF .
ANNUAL REVIEW OF MATERIALS SCIENCE, 1982, 12 :323-350