REACTION-MECHANISM AND KINETICS OF SILANE PYROLYSIS ON A HYDROGENATED AMORPHOUS-SILICON SURFACE

被引：80

作者：

ROBERTSON, R ^{[1
]}

GALLAGHER, A ^{[1
]}

机构：

[1] UNIV COLORADO,NBS,JOINT INST LAB ASTROPHYS,BOULDER,CO 80302

来源：

JOURNAL OF CHEMICAL PHYSICS | 1986年 / 85卷 / 06期

关键词：

D O I：

10.1063/1.450933

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：3623 / 3630

页数：8

共 24 条

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