共 4 条
A WAFER CHARGE-UP-REDUCING SYSTEM OF A HIGH-CURRENT ION IMPLANTER
被引:10
作者:

HIGUCHI, T
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SATO, M
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TAMAI, T
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D O I:
10.1016/0168-583X(89)90257-7
中图分类号:
TH7 [仪器、仪表];
学科分类号:
0804 ;
080401 ;
081102 ;
摘要:
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页码:605 / 608
页数:4
相关论文
共 4 条
[1]
CHARGING STUDIES IN APPLIED MATERIALS PRECISION IMPLANT 9000 SYSTEM
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GLAWISCHNIG, H
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机构: APPL MAT INC,DIV IMPLANT,HORSHAM,SUSSEX,ENGLAND

HOLTSCHMIDT, W
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机构: APPL MAT INC,DIV IMPLANT,HORSHAM,SUSSEX,ENGLAND
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HOLMES, M
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机构: US DEPT HEW,HLTH RESOURCES ADM,OFF HLTH RESOURCES OPPORTUN,WASHINGTON,DC 20201

STEINBACH, L
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机构: US DEPT HEW,HLTH RESOURCES ADM,OFF HLTH RESOURCES OPPORTUN,WASHINGTON,DC 20201

HAUSNER, T
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机构: US DEPT HEW,HLTH RESOURCES ADM,OFF HLTH RESOURCES OPPORTUN,WASHINGTON,DC 20201

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[3]
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RYDING, G
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机构: ZYMET CORP,BEVERLY,MA 01915

DOUGLASHAMILTON, DH
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机构: ZYMET CORP,BEVERLY,MA 01915

STEEPLES, K
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机构: ZYMET CORP,BEVERLY,MA 01915

FARLEY, M
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机构: ZYMET CORP,BEVERLY,MA 01915

GILLIS, V
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机构: ZYMET CORP,BEVERLY,MA 01915

WHITE, N
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机构: ZYMET CORP,BEVERLY,MA 01915

WITTKOWER, A
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机构: ZYMET CORP,BEVERLY,MA 01915

LAMBRACHT, R
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OUTCAULT, R
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MCKENNA, C
论文数: 0 引用数: 0
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ROBERTSON, T
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BIONDO, L
论文数: 0 引用数: 0
h-index: 0