A NEW COMPUTER DESIGNED FARADAY SYSTEM FOR HIGH-CURRENT ION-IMPLANTATION SYSTEMS

被引：9

作者：

OUTCAULT, R

MCKENNA, C

ROBERTSON, T

BIONDO, L

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 21卷 / 2-4期

关键词：

D O I：

10.1016/0168-583X(87)90856-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：354 / 359

页数：6

共 10 条

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[2]

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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4) :424-427

[4] A TECHNIQUE FOR OPTIMIZING THE DOSE UNIFORMITY OF A MAGNETIC SCANNING HIGH-CURRENT IMPLANTER [J].

EHRLICH, C ;

DELFORGE, A ;

LIEBERT, R .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 6 (1-2) :228-236

[5]

HANLEY PR, 1983, SPRINGER SERIES ELEC, V11, P2

[6] 0.5 MU-M PARTICULATE PERFORMANCE OF A BATCH PROCESS IMPLANTER [J].

JOST, J ;

ANGELO, G ;

TURNER, J .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4) :372-377

[7] PERFORMANCE-CHARACTERISTICS OF THE EXTRION 160-10 ION-IMPLANTATION SYSTEM [J].

LIEBERT, R ;

PEDERSEN, B ;

EHRLICH, C ;

CALLAHAN, W .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 6 (1-2) :16-26

[8]

MCKENNA CM, 1983, SPRINGER SERIES ELEC, V10, P73

[9]

WAUK T, 1987, NUCL INSTR METH B, V21, P280

[10] HISTORICAL-PERSPECTIVE AND FUTURE-TRENDS FOR ION-IMPLANTATION SYSTEMS [J].

WEGMANN, L .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 189 (01) :1-6

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