X-RAY ROCKING CURVES ON INHOMOGENEOUS SURFACE-LAYERS ON SI SINGLE-CRYSTALS .2. IMPLANTED LAYERS

被引:15
作者
HOLY, V
KUBENA, J
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D O I
10.1007/BF01596828
中图分类号
O4 [物理学];
学科分类号
0702 ;
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页码:750 / 766
页数:17
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