QUANTITATIVE-ANALYSIS OF MICROSEGREGATION IN SILICON GROWN BY CZOCHRALSKI METHOD

被引：47

作者：

MURGAI, A

GATOS, HC

WITT, AF

机构：

[1] MIT,DEPT MAT SCI & ENGN,CAMBRIDGE,MA 02139

[2] MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1976年 / 123卷 / 02期

关键词：

D O I：

10.1149/1.2132791

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：224 / 229

页数：6

相关论文

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