MICROSTRUCTURE AND GROWTH-KINETICS OF CRSI2 ON SI(100) STUDIED USING CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY

被引：18

作者：

NATAN, M

DUNCAN, SW

机构：

来源：

THIN SOLID FILMS | 1985年 / 123卷 / 01期

关键词：

D O I：

10.1016/0040-6090(85)90042-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：69 / 85

页数：17

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