RBS AND OPTICAL INVESTIGATIONS OF DEFECTS IN WEAKLY DAMAGED GAAS

被引：17

作者：

WESCH, W

GARTNER, K

WENDLER, E

GOTZ, G

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 15卷 / 1-6期

关键词：

D O I：

10.1016/0168-583X(86)90338-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：431 / 434

页数：4

共 8 条

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ASANO, T ;

HEMMENT, PLF .

SOLID-STATE ELECTRONICS, 1980, 23 (10) :1089-1090

[2] AXIAL DECHANNELING .2. POINT-DEFECTS [J].

GARTNER, K ;

HEHL, K ;

SCHLOTZHAUER, G .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 4 (01) :55-62

[3] DEFECT ANALYSIS BY DECHANNELING [J].

GARTNER, K ;

GLASER, E ;

GOTZ, G ;

HEHL, K .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 15 (1-6) :317-321

[4]

WENDLER B, 1984, P INT C ENERGY PULSE, P535

[5]

WENDLER E, PHYS STAT SOL A

[6] RADIATION-DAMAGE AND NEAR EDGE OPTICAL-PROPERTIES OF NITROGEN IMPLANTED GALLIUM-ARSENIDE [J].

WESCH, W ;

WILK, E ;

HEHL, K .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1982, 70 (01) :243-248

[7]

WESCH W, 1985, UNPUB RAD EFF

[8] ION-BEAM-INDUCED ANNEALING EFFECTS IN GAAS [J].

WILLIAMS, JS ;

AUSTIN, MW .

NUCLEAR INSTRUMENTS & METHODS, 1980, 168 (1-3) :307-312

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