共 34 条
[11]
ION-BEAM-ASSISTED ETCHING OF DIAMOND
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1985, 3 (01)
:416-418
[12]
HAGSTRUM HD, 1977, INELASTIC ION SURFAC, P1
[14]
KELLY R, 1983, RAD EFF, V80, P167
[15]
ON THE FLUENCE DEPENDENCE OF THE SPUTTERING YIELD FOR LOW-ENERGY NOBLE-GAS IONS
[J].
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,
1982, 29 (03)
:133-139
[18]
KOLFSCHOTEN AW, UNPUB
[19]
KOLFSCHOTEN AW, 1985, NUCL INSTR METH B, V7, P809
[20]
KOLFSCHOTEN AW, 1984, J VAC SCI TECHNOL A, V2, P487