SOLID-PHASE REDUCTION OF SIO2 IN THE PRESENCE OF AN AL LAYER

被引：14

作者：

BLATTNER, RJ ^{[1
]}

BRAUNDMEIER, AJ ^{[1
]}

机构：

[1] SO ILLINOIS UNIV,DEPT PHYS,EDWARDSVILLE,IL 62025

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 03期

关键词：

D O I：

10.1116/1.571292

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：320 / 323

页数：4

共 9 条

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[8] STOWERS IF, 1979, SURFACE CONTAMINATIO, V1, P341
[9] CHEMICAL-STRUCTURE OF AL-SIO2 INTERFACE
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