INFLUENCE OF RF POWER ON PROPERTIES OF A-SI1-XGEX-H PREPARED BY RF GLOW-DISCHARGE DECOMPOSITION

被引：17

作者：

NISHIKAWA, S

KAKINUMA, H

WATANABE, T

NIHEI, K

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1986年 / 25卷 / 04期

关键词：

D O I：

10.1143/JJAP.25.519

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：519 / 523

页数：5

共 11 条

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