EFFECT OF ORIENTATION ON SURFACE CHARGE DENSITY AT SILICON-SILICON DIOXIDE INTERFACE

被引:33
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MIURA, Y
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10.1143/JJAP.4.958
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O59 [应用物理学];
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页码:958 / &
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共 7 条
[1]   STABILIZATION OF SILICON SURFACES BY THERMALLY GROWN OXIDES [J].
ATALLA, MM ;
TANNENBAUM, E ;
SCHEIBNER, EJ .
BELL SYSTEM TECHNICAL JOURNAL, 1959, 38 (03) :749-783
[2]   ELECTRONIC STATES IN PERTURBED PERIODIC SYSTEMS [J].
JAMES, HM .
PHYSICAL REVIEW, 1949, 76 (11) :1611-1624
[3]   EFFECT OF TEMPERATURE + BIAS ON GLASS-SILICON INTERFACES [J].
KERR, DR .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1964, 8 (04) :385-&
[5]  
LINDNER R, 1962, BELL SYST TECH J, V41, P804
[6]   ELECTROCHEMICAL PHENOMENA IN THIN FILMS OF SILICON DIOXIDE ON SILICON [J].
SERAPHIM, DP ;
BRENNEMANN, AE ;
FRIEDMAN, HL ;
DHEURLE, FM .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1964, 8 (04) :400-+
[7]   SPACE-CHARGE MODEL FOR SURFACE POTENTIAL SHIFTS IN SILICON PASSIVATED WITH THIN INSULATING LAYERS [J].
THOMAS, JE ;
YOUNG, DR .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1964, 8 (04) :368-+