OPTIMIZATION OF PARAMETERS FOR DYNAMIC RECOIL MIXING OF GOLD-FILMS DEPOSITED ON SILICON

被引：9

作者：

ARGYROKASTRITIS, P

KARPUZOV, DS

COLLIGON, JS

HILL, AE

KHEYRANDISH, H

机构：

来源：

PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES | 1984年 / 49卷 / 04期

关键词：

D O I：

10.1080/01418618408236555

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：547 / 556

页数：10

共 20 条

[1]

BIASSE B, 1983, NUCL INSTRUM METH, V209

[2] RECOIL IMPLANTATION OF ANTIMONY IN SILICON [J].

BRUEL, M ;

FLOCCARI, M ;

GAILLIARD, JP .

NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR) :93-96

[3] RECOIL IMPLANTATION OF MATERIALS [J].

COLLIGON, JS ;

FISCHER, G ;

PATEL, MH .

JOURNAL OF MATERIALS SCIENCE, 1977, 12 (04) :829-831

[4]

FIRSOV OB, 1958, SOV PHYS JETP-USSR, V6, P534

[5] 2-GUN ION-BEAM SYSTEM FOR DYNAMIC RECOIL IMPLANTATION [J].

FISCHER, G ;

HILL, AE ;

COLLIGON, JS .

VACUUM, 1978, 28 (6-7) :277-281

[6] ION-BEAM TECHNIQUES FOR MATERIAL MODIFICATION [J].

GRANT, WA ;

COLLIGON, JS .

VACUUM, 1982, 32 (10-1) :675-683

[7] RECOIL IMPLANTATION OF ANTIMONY INTO SILICON [J].

GROB, A ;

GROB, JJ ;

MESLI, N ;

SALLES, D ;

SIFFERT, P .

NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR) :85-92

[8]

HIRVONEN JK, 1980, ION IMPLANTATION TRE, V18

[9]

HITCHMAN ML, 1983, EUROPEAN C SENSORS T

[10] COMPUTER-SIMULATION OF LOW-ENERGY SPUTTERING IN THE BINARY COLLISION APPROXIMATION [J].

HOU, M ;

ROBINSON, MT .

APPLIED PHYSICS, 1979, 18 (04) :381-389

← 1 2 →